Combinatorial Depositions

Combinatorial Chamber: No. 5
Materials: Nitrides
Substrates: <4" diameter, <800C
Targets: 2" circular
Gases: Ar, N, N2/H2
Base pressure: 10^-9-10-⁸ Torr
Features: Load lock, N plasma source, cryoshroud, and in-vacuo source shifts

Publications:

Synthesis Pathways to Thin Films of Stable Layered Nitrides, Nature Synthesis (2024)

GdWN₃ Is A Nitride Perovskite, Applied Physics Letters (2024)

Structural and Optoelectronic Properties of Thin Film LaWN₃, Physical Review Materials (2023)

Reduced Synthesis Temperatures of SrNbO₂N Perovskite Films for Photoelectrochemical Fuel Production, Journal of Materials Research (2022)

Combinatorial Chamber: No. 6
Materials: Oxides, nitrides, and oxynitride
Substrates: <6" square, <600C
Targets: 3" circular
Gases: Ar, O, N, N2/H2
Base pressure: 10^-9-10^-8 Torr
Features: load lock, N plasma source, and vacuum transfer

Publications:

Combinatorial Synthesis of Cation-Disordered Manganese Tin Nitride MnSnN₂ Thin Films with Magnetic and Semiconducting Properties, Chemistry of Materials (2023)

Exploring the Phase Space of Zn₂SbN₃, a Novel Semiconducting Nitride, Journal of Materials Chemistry C (2021)

Combinatorial Investigation of Structural and Optical Properties of Cation-Disordered ZnGeN₂, J. Mat. Chem. C (2020)

Combinatorial Synthesis of Magnesium Tin Nitride Semiconductors, J. Am. Chem. Soc. (2020)

Combinatorial Chamber: No. 9
Materials: Nitrides and oxynitrides
Substrates: <4" diameter, <1000C
Targets: 2" circular
Gases: Ar, O, N, N2/H2
Base pressure: 10^-9-10^-8 Torr
Features: N hollow cathode plasma source, LN2 substrate cooling, in-vacuo source angle adjustment, and individual gas control for all metal sources

Publications:

Sn-Assisted Heteroepitaxy Improves ZnTiN₂ Photoabsorbers, Journal of Materials Chemistry A (2024)

Autonomous Sputter Synthesis of Thin Film Nitrides With Composition Controlled by Bayesian Optimization of Optical Plasma Emission, APL Materials (2023)

Synthesis and Calculations of Wurtzite Al_1–xGd_xN Heterostructural Alloys, Chemistry of Materials (2022)

Combinatorial Chamber: No. 10
Materials: Nitrides
Substrates: <4" diameter, <800C
Targets: 3" circular
Gases: Ar, N
Base pressure: 10^-9-10^-8 Torr
Features: Dedicated to (Al,Sc)N and related materials

Publications:

Combinatorial Synthesis and Characterization of Thin Film Al_1-xRE_xN (RE = Pr³⁺, Tb³⁺) Heterostructural Alloys, Journal of Materials Chemistry C (2024)

Synthesis and Calculations of Wurtzite Al_1–xGd_xN Heterostructural Alloys, Chemistry of Materials (2022)

Reduced Coercive Field in Epitaxial Thin Film of Ferroelectric Wurtzite Al_0.7Sc_0.3N, Applied Physics Letters (2021)

Understanding Reproducibility of Sputter Deposited Metastable Ferroelectric Wurtzite Al_0.6Sc_0.4N Films using In‐situ Optical Emission Spectrometry, Rapid Research Letters (2021)

Combinatorial Chamber: No. 1
Materials:  Metals, carbides and nitrides
Substrates: < 3" diameter, < 800C
Targets: 2" circular
Gases: Ar, O, N, N2/H2
Base pressure: 10-7-10-6 Torr
Features: N/O plasma source

Publications:

Theoretical Prediction and Experimental Realization of New Stable Inorganic Materials Using the Inverse Design Approach, J. Am. Chem. Soc. (2013)

X-ray Photoelectron Spectroscopy and Rotating Disk Electrode Measurements of Smooth Sputtered Fe-N-C Films, Applied Surface Science (2020)

Combinatorial Chamber: No. 4
Materials: Chalcogenides and oxychalcogenides
Substrates: <4" diameter, <800C
Targets: 2" circular
Gases: Ar, O, Ar/H2S
Base pressure: 10^-8-10^-7 Torr
Features: Load lock, S plasma source, vacuum transfer, programmable shutters, and source-specific quartz crystal microbalances

Publications:

Nitrogen Stabilizes the Wurtzite Polymorph in ZnSe_1−xTe_x Thin Films, Journal of Materials Chemistry C (2022)

Synthesis of Tunable SnS-TaS₂ Nanoscale Superlattices, Nano Letters (2020)

Negative-Pressure Polymorphs Made by Heterostructural Alloying, Science Advances (2018)

Combinatorial Chamber: No. 7
Materials: Li-containing materials
Substrates: <4" diameter, <800C
Targets: 3" circular
Gases: Ar, O, N
Base pressure: 10^-9-10^-8 Torr
Features: Glove box and co-evaporation

Publications:

Chemistry of Electrolyte Reduction on Lithium Silicide, J. Phys. Chem. C (2019)

Investigating the Effects of Lithium Phosphorous Oxynitride Coating on Blended Solid Polymer Electrolytes, ACS Appl. Mater. Interfaces (2020)

Lithium Nitride Coatings Deposited by Magnetron Sputtering on Sulfide Electrolytes for Solid-State Batteries, MRS Communications (2022)

Combinatorial Chamber: No. 8
Materials: Phosphides
Substrates: <4" diameter, <800 °C
Targets: 2" circular
Gases: Ar, Ar/PH₃
Base pressure: 10^-9-10^-8 Torr
Features: Load-lock

Publications:

Low-Temperature Synthesis of Stable CaZn₂P₂ Zintl Phosphide Thin Films as Candidate Top Absorbers, Advanced Energy Materials (2024)

Is Cu_3–xP a Semiconductor, a Metal, or a Semimetal?, Chemistry of Materials (2023)

Epitaxial ZnGeP₂ Thin Films on Si and GaP by Reactive Combinatorial Sputtering in Phosphine, Crystal Growth & Design (2022)

Crystallize It Before It Diffuses: Kinetic Stabilization of Thin-Film Phosphorus-Rich Semiconductor CuP₂, Journal of the American Chemical Society (2022)

Boron Phosphide Films by Reactive Sputtering: Searching for a P-Type Transparent Conductor, Advanced Materials Interfaces (2022)

Combinatorial Chamber: No. 3
Materials: Oxides
Substrates: <4" diameter, <800C
Targets: 1" or 2" circular
Gases: Ar, O, N, N2/H2
Base pressure: 10^-9-10^-8 Torr
Features: Load lock

Publications:

Nucleation and Growth of GaAs on a Carbon Release Layer by Halide Vapor Phase Epitaxy, ACS Omega (2023)

Double-Site Ce Substitution of (Ba,Sr)MnO₃ Perovskites for Solar Thermochemical Hydrogen Production, ACS Energy Letters (2021)

High-Throughput Experimental Study of Wurtzite Mn_1–xZn_xO Alloys for Water Splitting Applications, ACS Omega (2019)

Defect Chemistry and Doping of Ultrawide Band Gap (III)BO₃ Compounds, Chemistry of Materials (2023)